Design of Torque Measurement System Based on Micro-capacitance Detection
(1.College of Mechanical Engineering, Chongqing University of Technology, Chongqing 400054, China; 2.Engineering Research Center of Mechanical Testing Technology and Equipment of Ministry of Education, Chongqing University of Technology, Chongqing 400054, China; 3.Chongqing Key Laboratory of Time Grid Sensing and Advanced Detection Technology, Chongqing University of Technology, Chongqing 400054, China)
Abstract
Aiming at the problems of small capacitance and weak output signal of miniaturized capacitive torque sensors, this paper designs an instrumentation three-operational amplifier micro-capacitance detection circuit based on a ring diode bridge structure. This circuit takes the ring diode bridge as the core, and is combined with a transimpedance amplifier and a three-op amp instrumentation amplifier to convert capacitance changes into voltage signals. The circuit effectively suppresses common-mode interference and improves the signal-to-noise ratio. The experimental results show that the sensitivity of the detection circuit is 21.6 mV/pF, a capacitance resolution of 0.1 pF can be achieved, and the nonlinear error is less than 0.3% FS.
Keywords
torque sensor; micro-capacitance detection; ring diode bridge; instrumentation three-op amp
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About the authors
Liu Pengcheng (1999-), male, Han ethnicity, from Chengdu, Sichuan, is currently pursuing a master's degree in embedded systems and intelligent instruments; Gao Zhonghua (1972-), male, Han ethnicity, from Qiqihar, Heilongjiang Province, is a senior engineer and doctoral student. His research interests include precision instruments, machinery, and intelligent sensors.