摘 要：针对非本征F-P 干涉仪式光纤声压传感器中的声压敏感薄膜性能提升，设计并制备了不同厚度和不同增敏环数的声压敏感薄膜结构。对不同声压敏感薄膜感知声压的性能进行测试。结果表明：声压敏感薄膜的厚度越薄，其声压灵敏度越大，对比400 nm 厚度和1 000 nm 厚度的声压敏感薄膜，发现在相同声压的声波作用下，前者的输出电压比后者大一个数量级。此外，增加增敏环数可以有效地释放应力，降低薄膜的刚性，使得声压传感器的性能有所提升。
关键词：微光电子机械系统；F-P 干涉；光纤传感；声压传感器；增敏结构
DOI:10.19850/j.cnki.2096-4706.2021.02.009
中图分类号：TP212 文献标识码：A 文章编号：2096-4706（2021）02-0035-03
Design and Analysis of Sensitive Film in EFPI Fiber Optic Acoustic Pressure Sensor
XIE Tao1，YANG Zhi1，2，WANG Wenjun1，3，WU Yu4，LIU Tao4
（1.The 13th Research Institute of CETC，Shijiazhuang 050051，China；2.Science and Technology on ASIC Laboratory，Shijiazhuang 050051，China；3.Beijing Maiteda Research & Development Company，Beijing 100080，China；4.School of Information and Communication Engineering，University of Electronic Science and Technology of China，Chengdu 611731，China）
Abstract： In order to improve the performance of acoustic pressure sensitive film in extrinsic F-P interferometric fiber optic acoustic pressure sensor，the structures of acoustic pressure sensitive films with different thickness and different number of sensitizing rings were designed and fabricated. The performance of different sound pressure sensitive films was tested. The results showed that the thinner the thickness of the sound pressure sensitive film was，the greater the sound pressure sensitivity was. Compared with the sound pressure sensitive film with 400 nm thickness and 1 000 nm thickness，it was found that the output voltage of the former is one order of magnitude larger than that of the latter under the same sound pressure. In addition，increasing the number of sensitizing rings could effectively relieve the stress，reduce the rigidity of the film and improve the performance of the sound pressure sensor.
Keywords： MOEMS；F-P interference；optical fiber sensing；acoustic pressure sensor；sensitization configuration
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作者简介：解涛（1986—），男，汉族，黑龙江伊春人，工程 师，博士研究生，研究方向：传感器和工艺研究。